Analysis of thermoelastic damping limited quality factor and critical dimensions of circular plate resonators based on axisymmetric and non-axisymmetric vibrations

Thermoelastic damping effects are very important intrinsic losses in microelectromechanical system/nanoelectromechanical system based sensors and filters, which limit the maximum achievable quality factor. Thermoelasticity arises due to coupling between temperature field elastic of material its interaction within structure. The impacts axisymmetric non-axisymmetric vibrations, plate dimensions, parameters, boundary conditions, mode switching, on thermoelastic limited factors (QTED) critical thickness (hc) were analyzed, conditions for an enhanced factor optimized this work. analytical models circular resonators have been developed terms performance indices vibrations. QTED hc analyzed two conditions: simply supported clamped–clamped. In order obtain QTED, micro-circular plates with diamond as structural operating at a lower vibrations proposed paper.